Precision Design of Probe Station Calibration Device for Wafer Test System
نویسندگان
چکیده
Abstract Aiming at the problem that probe station of current wafer test system cannot be measured, a calibration device for playing table is designed. The fully considers structure and uses laser interferometer to realize system. Various error sources are analyzed, errors allocated according device’s technical indicators. calculation results show maximum allowable designed 0.764μm, which in line with specifications.
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2023
ISSN: ['1742-6588', '1742-6596']
DOI: https://doi.org/10.1088/1742-6596/2428/1/012004